Max Pressure Max Temp  
Model Type Full Scale Capacity Accuracy bar psig C F Input/Output
SLAMf50-small
SLAMf Series
Digital Flow Meter/Controller 3 sccm - 2500 slpm 0.7% Rate
and
0.2% FS
100 1500 65 150 0-5 Vdc,
4-20 mA,
FOUNDATION fieldbus™,
RS-485
Button-Data-Sheet-25Button-User-Manual-25
 
SLAMf50-small
Mf-S Series
Smart Mass Flow
Meter/Controller
3 sccm - 36000 slpm 0.7% Rate
and
0.2% FS
100 1500 65 150 0-5 Vdc,
4-20 mA,
RS-232/485
PROFIBUS DP®
Button-Data-Sheet-25Button-User-Manual-25
 
SLAMf50-small
Mfi Series
Analog Flow Meter/Controller 3 sccm - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25

 

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