GF100, GF40/80 Series Thermal Mass Flow Meters & Flow Controllers
Giá bán: Liên hệ
Hãng sản xuất: Chua phan loai
Danh mục: Brooks instrument
028 3517 0401
GF100 Series Thermal Mass Flow Meters & Flow Controllers
Designed for semiconductor, MOCVD and other gas flow control applications that require a high-purity, all-metal flow path, the Brooks GF100 Series mass flow controllers deliver outstanding performance, reliability and flexibility. The GF100 Series has been marathon-tested to over three times the semiconductor industry standard for reliability, ensuring repeatable low-drift performance over time.
- Ultra-fast 300-millisecond settling time
- Optional pressure transient insensitive (PTI), high accuracy and safe delivery system models available
- MultiFlo™ gas and range configurability
- Corrosion-resistant Hastelloy® sensor tube and valve orifice (jet)
GF40/80 Series Thermal Mass Flow Meters & Flow Controllers
Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.
- Elastomer or metal seal
- Fast sub 1 second settling time
- MultiFlo gas and range configurability
- Corrosion-resistant Hastelloy sensor tube
MultiFlo Capable Thermal Mass Flow Controllers & Flow Meters
| Max Pressure | Max Temp | ||||||||
| Model | Type | Full Scale Capacity | Accuracy | bar | psig | C | F | Input/Output | |
|
|
Ultra-High Purity PTI Metal Seal Mass Flow Controller |
3 sccm - 55 slpm N2 equivalent |
±1% rate (35-100% FS) |
6 | 85 | 50 | 122 | 0 - 5 Vdc / RS485 / DeviceNet™ | |
    |
|||||||||
|
|
Ultra-High Purity Metal Seal Mass Flow Controller or Flow Meter |
3 sccm - 55 slpm N2 equivalent |
±1% rate (35-100% FS) |
33 | 485 | 50 | 122 | 0 - 5 Vdc / RS485 / DeviceNet™ | |
|
|
|||||||||
|
|
High Purity Metal Seal Mass Flow Controller or Flow Meter |
3 sccm - 55 slpm N2 equivalent |
±1% rate (35-100% FS) |
33 | 485 | 50 | 122 | 0 - 5 Vdc / RS485 / DeviceNet™ | |
|
|
|||||||||
|
|
Ultra-High Purity High-Accuracy Metal Seal Mass Flow Controller or Flow Meter |
5 sccm - 10 slpm N2 equivalent |
±1% rate (10-100% FS) |
6 | 85 | 50 | 122 | 0 - 5 Vdc / RS485 / DeviceNet™ | |
|
|
|||||||||
|
Safe Delivery System |
Ultra-High Purity Safe Delivery Metal Seal Mass Flow Controller | 4 sccm - 1 slpm |
±1% rate (35-100% FS) |
33 | 485 | 50 | 122 | 0 - 5 Vdc / RS485 / DeviceNet™ | |
|
|
|||||||||
| Max Pressure | Max Temp | ||||||||
| Model | Type | Full Scale Capacity | Accuracy | bar | psig | C | F | Input/Output | |
|
|
Metal Seal Mass Flow Controller or Flow Meter | 3 sccm - 30 slpm |
±1% rate (35-100% FS) |
10 | 150 | 65 | 150 | 0-5 Vdc / 4-20 mA / Profibus / RS485 / DeviceNet™ | |
|
|
|||||||||
|
|
Elastomer Seal Mass Flow Controller or Flow Meter | 3 sccm - 30 slpm |
±1% rate (35-100% FS) |
10 | 150 | 65 | 150 | 0-5 Vdc / 4-20 mA / Profibus / RS485 / DeviceNet™ | |
|
|
|||||||||
Brooks Vietnam | ANS Vietnam
support@ansgroup.asia
0911472255