General Purpose Flow Controllers & Flow Meters Brooks Instruments - Brooks Vietnam | ANS Vietnam

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General Purpose Thermal Mass Flow Controllers and Flow Meters

        Max Pressure Max Temp  
Model Type Full Scale Capacity Accuracy bar psig C F Input/Output

TMF-SLA5850

SLA5800 Series		 Elastomer Seal Meter/Controller 3 sccm - 2500 slpm 1% Rate or 0.7% Rate
0.2% FS		 300 4500 65 150 0-5 Vdc, 4-20 mA, RS-485
DeviceNet™
FOUNDATION fieldbus™
Button-Data-Sheet-25Button-User-Manual-25
 

TMF-5850S-200

5800S Series		 Mass Flow Meter/Controller 3 sccm - 2500 slpm 0.7% Rate & 0.2% FS 300 4500 65 150 0-5 Vdc, 4-20 mA, RS-232/485
Profibus
FOUNDATION fieldbus™
Button-Data-Sheet-25Button-User-Manual-25
 

TMF-4800

4800 Series		 Mass Flow Meter/Controller 50 sccm - 40 slpm ±1% FS or
±3% FS		 10 150 50 122 0-5 Vdc, 4-20 mA, RS-232/485
Profibus
Optional Local Operator Interface available for the 4800 Series.
Button-Data-Sheet-25Button-User-Manual-25
Click here to download the 4800 Series Software.

        Max Pressure Max Temp  
Model Type Full Scale Capacity Accuracy bar psig C F Input/Output

TMF-5851EM-200

5850EM		 Metal Seal Controller 3 sccm - 30 slpm 1% Rate 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 

TMF-5851EM-200

5851EM		 Metal Seal Controller 10 - 100 1% Rate 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5850E-200
5850E		 Elastomer Seal
Meter/Controller		 3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5851EM-200
5851E		 Elastomer Seal
Meter/Controller		 10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5853i-200
5853E		 Elastomer Seal
Meter/Controller		 100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5860E-D-200
5860E		 Elastomer Seal Meter 3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5860E-D-200
5861E		 Elastomer Seal Meter 10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5863E-200
5863E		 Elastomer Seal Meter 100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5850i-200
5850i		 Elastomer Seal
Meter/Controller		 3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5850i-200
5851i		 Elastomer Seal
Meter/Controller		 10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5853i-200
5853i		 Elastomer Seal
Meter/Controller		 100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5860i-Dtype-200
5860i		 Elastomer Seal Meter 3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5860i-Dtype-200
5861i		 Elastomer Seal Meter 10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5863E-200
5863i		 Elastomer Seal Meter 100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25
 

 

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