Brooks Instrument, Flow Meters, Flow Controllers, Pressure, Vacuum and Level Vietnam_ANS Vietnam (20/04/2012)
Our goal is to meet your needs for high quality flow measurement and flow control solutions with timely delivery and strong application support all over the world. We maintain an integrated global sales and technical network to support you on a local level no matter where your needs may be.

Brooks – Application Experience Beyond Measure


Every day, customers turn to Brooks Instrument for solutions to their flow, pressure, vacuum and level challenges. In industries as diverse as biopharmaceuticals, oil and gas, fuel cell, solar cell, chemicals, medical devices, analytical instrumentation, and semiconductors, Brooks provides the broadest array of flow products in the market. Our award-winning flow meters and flow controllers consistently rank at the top of their category for accuracy, reliability, and user preference, as judged by the audience that matters – users of flow instruments.

But Brooks’ products are only half the story. Our customers are backed by unsurpassed technical expertise in virtually every corner of the planet. The local Brooks product and application specialist brings to each customer priceless application experience. They have been extensively trained to help you select the optimal solutions for your measurement or control needs, and offer years of experience solving application problems just like yours. 

Global manufacturing and support for all your flow control needs Brooks products are made at our Hatfield, PA USA facility with additional operations in the Netherlands, Hungary, and Japan. Brooks Instrument is certified to ISO 9001:2000.

Our goal is to meet your needs for high quality flow measurement and flow control solutions with timely delivery and strong application support all over the world. We maintain an integrated global sales and technical network to support you on a local level no matter where your needs may be.

More Service & Support information

Global Support
Industries We Serve

  • When technology matters: Brooks’ revolutionary MultiFlo technology offers users of thermal mass flow meters and flow controllers tremendous flexibility to satisfy a broad range of applications with one device.
  • When quality matters: A leading anesthesiology equipment supplier uses thousands of Brooks needle valves annually because of precise, repeatable ‘feel’.
  • When precision matters: A Big 5 chemical company uses Brooks thermal mass flow controllers and Quantim Coriolis mass flow controllers exclusively for their critical catalyst and process research.
  • When repeatability matters: Many leading biotechnology companies use only Brooks thermal mass flow controllers on both bench-top reactors and full production units to ensure smooth scale-up.
  • When consistent performance over a wide range of flows matters: Leading fuel cell companies worldwide specify Brooks thermal mass flow controllers for their exceptional accuracy, wide turn-down and response time.
  • When global reach matters: Leading engineering contractors select Brooks variable area flow meters for multi-national projects that require compliance with global standards because of Brooks’ local experience and global support.
  • When certifications matter: Many Brooks products are available with national laboratory-calibration traceability and certification, recognized hazardous area approvals, pressure boundary certifications, material certifications, and more.

So if you are serious about improving your process yield, throughput and product quality, choose Brooks.

Flow Meters, Flow Controllers, Pressure, Vacuum & Level


At Brooks Instrument, we look at each customer’s unique needs, apply the right combination of technologies and provide turnkey installation and integration assistance on a global basis. Brooks provides an array of flow, pressure, vacuum and level products for dozens of industries from pharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing and more.

Brooks Flow Meter, Flow Controller, Pressure, Vacuum Capacitance Manometers and Level Products:

  • Direct Liquid Injection Vaporizer Systems
  • Thermal Mass Flow Meters / Flow Controllers
  • Coriolis Mass Flow Meters / Flow Controllers
  • Variable Area Flow Meters (Purgemeters)
  • Ultrasonic Liquid Flow Controllers
  • Positive Displacement Meters
  • Pressure Products
  • Vacuum Capacitance Manometers
  • Level Measurement

Direct Liquid Injection Vaporizer Systems

The Brooks family of extremely high-performing direct liquid injection (DLI) vaporizer solutions is designed for customers who require reliable liquid vaporization. Featuring unique atomization and heat exchanger technologies, these vapor delivery systems deliver pure vapor for every application. Applications include:
  • Water vaporization for fuel cell stack humidification and many other water addition applications
  • Liquid precursor vaporization for chemical vapor deposition (CVD), metal oxide chemical vapor deposition (MOCVD), and atomic layer deposition (ALD)
  • Depositing thin films for enhanced thermal, optical, or hardness characteristics such as diamond-like carbon coating and glass coating
  • Vaporizing monomers for vacuum polymer film deposition
  • Generating calibration vapor
  • Vaporizing liquid hydrocarbons
  • Many more

Brooks' direct liquid injection vaporizer technology overcomes the many limitations of conventional vapor delivery systems. Bubblers, or vapor draw systems, are difficult to start and stop, require very close control of temperature and pressure, and are inefficient at generating well controlled vapor mass flow. Vaporizing valves, hot frit, heat tracing, and other "flash vaporizers" that apply heat to the liquid using a hot metal surface are also inefficient at generating vapor mass and frequently can cause thermal decomposition of the liquid precursor. None of these conventional technologies can eliminate the potential for liquid carry-over and its attendant problems. 

Furthermore, it is very challenging to determine precisely how much vapor mass is actually being delivered from a conventional vapor delivery system. In applications that require precise vapor mass addition, users must turn to secondary measurement/control devices such as vapor mass flow controllers, increasing the cost and complexity of the vapor module. 

MultiFlo Capable Thermal Mass Flow Controllers & Flow Meters

 GF100 Series Thermal Mass Flow Meters & Flow Controllers
TMF-GF125-200Designed for semiconductor, MOCVD and other gas flow control applications that require a high-purity, all-metal flow path, the Brooks GF100 Series mass flow controllers deliver outstanding performance, reliability and flexibility. The GF100 Series has been marathon-tested to over three times the semiconductor industry standard for reliability, ensuring repeatable low-drift performance over time.

  • Ultra-fast 300-millisecond settling time
  • Optional pressure transient insensitive (PTI), high accuracy and safe delivery system models available
  • MultiFlo™ gas and range configurability
  • Corrosion-resistant Hastelloy® sensor tube and valve orifice (jet)

GF40/80 Series 
Thermal Mass Flow Meters & Flow Controllers
TMF-GF4080-200Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.

  • Elastomer or metal seal
  • Fast sub 1 second settling time
  • MultiFlo gas and range configurability
  • Corrosion-resistant Hastelloy sensor tube


General Purpose Flow Controllers & Flow Meters

 With the largest installed base of thermal mass flow controllers and flow meters around the world, Brooks offers products with faster response, better accuracy and improved control over analog devices.
  • Industry-leading repeatability ensures a stable process even under changing conditions
  • Self diagnostics and alarms eliminate downtime
  • Multiple communication protocols allow easy integration into many control systems
  • Analog I/O devices allow for quick and easy system integration
  • Elastomer seal option provides exceptional leak integrity and maximizes control valve shutoff dependability
  • Globally approved for a variety of service areas

The Smart Link Advantage (SLA) Series is Brooks' premier smart digital thermal mass flow series. SLA mass flow controllers and mass flow meters link to advanced service tools and offer the advantage of digital protocols. The SLA Series provides many advanced features such as enhanced temperature stability, zero-drift diagnostics, coplanar valve for improved turndown, and more.

The 4800 Series features a broad flow range, compact size and MEMS-based sensor that provides lightning-fast response times.

NEMA 4X/IP66 Thermal Mass Flow Meters & Thermal Mass Flow Controllers

The Brooks Mf™ and SLAMf Series mass flow meters and flow controllers are designed specifically for use in harsh environments. Their unique NEMA4X/IP66 enclosure provides protection from dust and water making them ideal for indoor and outdoor use and perfect for hose down/washdown applications. The integrated sensor, valve and PID make these mass flow meters and flow controllers a cost-effective solution for hazardous area installations. 

This series is available with a variety of digital protocols including FOUNDATION Fieldbus communications – an all-digital, two-way communications technology that improves efficiency with advanced diagnostics, decreases installation costs, and operates with any control system.

Liquid Thermal Mass Flow Controllers & Flow Meters 

 The Brooks portfolio of products includes additional liquid metering and controlling devices. These products are appropriate for numerous specialized applications. 

Flomega™ liquid flow meters and flow controllers use thermal mass flow technology to accurately measure and control liquids, especially very low flows of liquid from 1 to 1000 grams per hour. They are weatherproof and certified for use in hazardous areas.

Secondary Electronics & Software Tools

Model 0254 four-channel power supply, readout and set-point controller
The Brooks 0254 is an innovative, reliable microcomputer-based controller that provides power for up to four Brooks mass flow meters and controllers, and/or pressure devices, all in a new compact design. Additionally, the 0254 can generate flow set-point commands, display flow rate, totalize flow, batch, blend multiple flow streams and more. This fully RoHS-compliant device has a very user-friendly operation and is offered with multiple mounting options such as rack mount, panel mount and table-top mount.

Brooks Smart Interface Model 0260 controls and monitors up to 30 devices
SE-0260-500golden_gas_trans_1_smallThe Brooks Smart Interface Model 0260 is a Microsoft Windows®-based software application that provides expanded control and monitoring capabilities in laboratory and research environments for Brooks thermal mass flow meters and controllers with an RS485 Smart protocol digital interface. Together with the power supply and RS485 to USB hardware module, this product is a great solution for monitoring and controlling up to 30 mass flow meters/controllers.

Brooks Service Suite
Brooks Instrument provides a variety of software and accessory options to simplify installations and start-up. Brooks software tools ensure mass flow controllers perform at their best. Calibration and control software, available for some models, allow customers to perform calibration checks to verify accuracy and repeatability.

Brooks Service Suite, Standard: Provides access to I/O tuning, alarm indication/configuration, diagnostics, selected response tuning, control and monitor.
Brooks Service Suite, Pro: Provides access to I/O tuning, alarm indication/configuration, diagnostics, selected response tuning, control and monitor, plus calibration and accuracy reporting capabilities. 

Coriolis Flow Meters and Flow Controllers

 The Brooks Quantim® Coriolis mass flow meter and mass flow controller provide precision mass flow measurement, integral control, on-line density and temperature measurement all in one compact package.

The heart of the device is a patented Coriolis sensor design which measures low flows independent of the fluid type or process variables. This provides you with unsurpassed performance, repeatable mass flow measurement and control even under changing conditions.

Brooks Quantim products are the smallest, lowest flow Coriolis meters and controllers available on the market. With a footprint the size of a handheld organizer, you can fit this instrument into any tight space.

Coriolis meters and controllers are available in NEMA 1/IP40, NEMA 4X/IP65, explosion proof and ANSI/ISA-76 downport configurations.

Low-Flow, Glass Variable Area Meters

The name Sho-Rate™ has meant reliability and performance for decades now and the 1350 and 1355 Sho-Rate variable area meters continue to deliver industry leading performance for gas or liquid flows today. Their robust and proven engineering ensures reliable indication and unsurpassed service life. Sho-Rate flow meters pioneered the concept of field-replaceable tube and float kits and, if necessary, the tube and float can be replaced in-line in a matter of minutes. Now Brooks introduces the new 1250 and 1255 Sho-Rate. These glass tube flow meters offer an easy-to-read rotating magnifying glass, making it the ideal choice for display on panels and cabinets. 


1350/1355 Sho-Rate
Rugged and Durable

  • Integral needle valves on inlet or outlet
  • Integral flow controller that compensates for varying inlet or outlet pressures
  • 316 stainless, brass, aluminum, or Kynar construction
  • Custom scales for any application

1250/1255 Sho-Rate
Ideal for Panel Display

  • Intergral needle valves on inlet or outlet
  • Direct read scales for common units and fluids
  • Easy change design allows quick interchangeability of tube assemblies
  • Rotating lens allows 180º view with magnification


Armored Metal Tube Rotameters

 The Brooks line of rugged metal tube variable area meters (rotameters) is ideal for high pressure, high temperature, and other demanding flow applications where safety is a concern.


  • Globally approved for use in hazardous environments
  • Needle valves available for flow control
  • Multiple connection options to match your existing system and provide easy installation
  • Many corrosion resistant material options for the metering of aggressive fluids
  • Alarm and 4-20mA with HART options provide for remote flow monitoring
  • Excellent meter repeatability provides consistent batch and/or process production
  • No power required which reduces installation cost and provides flow measurement in hazardous area
  • Low-pressure drop

High-Flow, Glass Tube Variable Area Meter

 The Brooks line of reliable glass tube variable area meters (rotameters) is ideal for many gas and liquid flow measuring applications where viewing the process is important.


  • Tube and float can be re-ranged in line, minimizing process down time
  • Rotatable connections for easy installation at any angle
  • Packing gland or O-ring sealing to meet piping requirements or customer preference
  • Globally approved for use in hazardous environments
  • Reliable – only one moving part
  • No power required which reduces installation cost and provides flow measurement in hazardous areas
  • Low-pressure drop allows for economical pump selection
  • Flow alarms available on some models
  • Rugged, vented polycarbonate enclosure available on most models

Plastic Tube Variable Area Flow Meters

 Brooks Instrument’s versatile, economic acrylic flow meters are ideal for a variety of air, water, and gas flow instrumentation applications. 

Series 2500 is a standard precision-machined acrylic flow meter for liquids and gases. It has direct reading air or water scales and is available in either English or Metric scales. Series 2500 can be configured with various control valve, fitting and O-ring options.


  • Easy-to-read English or Metric scales
  • Water ranges from 4 ccm to 20 GPM
  • Air ranges from 40 ccm to 4000 LPM
  • Threaded brass inserts for quick installation
  • Easy disassembly and assembly for maintenance
  • Durable one-piece clear acrylic construction
  • Stable, easy-to-read float

Control Valve

 Control Valve, Fine Control


VA-8500-Control-Valve-200Brooks Model 8500 Series NRS (non-rising stem) control valves are designed specifically for extremely low-flow gas and liquid applications. Straight and 90o angle pattern models in brass or stainless steel are available. They feature a means of adjusting a sliding tapered needle which prevents sticking. These valves are particularly suitable for precise control and possess a high turns-to-lift ratio. The flow is constant for any given stem position.

Flow Switch

CCB311 Flow Switch
Brooks flow switches are rugged, robust and reliable for usage in harsh and hazardous environments. Flow switches are designed to detect various flow rates in industrial process lines and activate an alarm or pump. 

The CCB311 flow switch is designed to detect low flows in horizontal or vertical pipes with an upward flow direction. Suitable for liquids for gases, the CCB311 flow switch is very robust with high repeatability and a very basic design. Certified explosion-proof or intrinsically safe. 

Sight Flow Indicator

 Model 1198 Flow Indicator
Brooks Instrument Model 1198 flow indicators provide quick, reliable and economical way to verity fluid flows through industrial process lines. Model 1198 is available with three styles of indicators including paddle wheel, flap style or drip tube/whistle shape. Many specials are also available upon request to meet various conditions of pressure, temperature, fluid types and mechanical dimensions.

Ultrasonic Liquid Flow Controllers

Brooks' LF200 Series ultrasonic liquid flow controllers feature an all-PFA wetted flowpath that is chemically inert and solvent resistant to virtually all chemicals, making the LF200 ideal for controlling flows of high purity and ultra-high purity liquids, de-ionized (and other highly pure) water, acids, bases, or similar fluids. In addition, the flow path is straight, permitting the LF200 liquid flow controller to measure complex dual-phase fluids like CMP slurries without imparting any shear force that could damage the fluid or cause agglomeration. The LF200 liquid flow controller employs a bi-directional, ultrasonic transit-time measurement technique and advanced signal processing algorithms to provide highly accurate flow measurement and control even in the presence of bubbles. Needle valve and pinch valve options are available.
  • Chemically inert flow path
  • Straight-through flow path with no bends or sharp turns
  • Very compact size
  • +/- 1% of rate accuracy available

Positive Displacement Meters

The Brooks® portfolio of products includes additional liquid metering and controlling devices. This includes Brooks’ Oval Gear positive displacement meters, which are ideal for highly viscous liquids in applications where accuracy and repeatability are critical

Pressure Controllers

Electronic pressure controllers are flexible devices for manipulating the pressure of gas or liquid upstream or downstream of the device.  Brooks electronic pressure controllers utilize the core control technology present in our industry leading thermal mass flow controllers.

Brooks replaces the thermal mass flow sensor with an integral pressure sensor.  Industry leading control valve technology and software then control the pressure of a fluid based on an setpoint signal to the device.  Using a closed loop control, Brooks pressure controllers do not have the drop associated with traditional mechanical spring diaphragm pressure regulators.  Brooks pressure controllers are available with internal pressure sensors to control pressure in a range from torr to 4500 psig.

Brooks pressure controllers can be configured to use external pressure sensors for added flexibility.  When using an external pressure sensor the flow of the gas required to maintain pressure can be monitored.

Ultra-High Purity Pressure Transducers

The Brooks® SolidSense II® Pressure Transducers are designed for stable, accurate, and reliable pressure monitoring in high purity and ultra-high purity (UHP) applications. A combination of optimum design and materials improves both signal stability and reliability in numerous pressure measurement applications.

Pressure transducers are widely used in high purity and ultra-high purity fluid storage and delivery systems in many industries. Unfortunately, a number of current transducers rely on technologies that have problems with zero and span drift, thermal shift, and case stress. Adjusting the transducer to rectify errors requires ongoing maintenance that increases downtime and cost of ownership.

Industrial Pressure Transmitters

The Brooks® SolidSense II® pressure transmitters are designed for stable, accurate, and reliable pressure monitoring in high purity and ultra-high purity applications. A combination of optimum design and materials improves both signal stability and reliability in numerous pressure measurement applications.

Pressure transmitters are widely used in high purity and ultra-high purity fluid storage and delivery systems in many industries. Unfortunately, a number of current transducers rely on technologies that have problems with zero and span drift, thermal shift, and case stress. Adjusting the pressure transmitter to rectify errors requiresgolden_gas_trans_1_smallongoing maintenance that increases downtime and cost of ownership.



Polymer Pressure Transmitters

 The unique Brooks Seal Free Pressure (SFP) transmitter provides excellent pressure measurement on high purity fluids. Unlike other high purity pressure transmitters, the SFP pressure transmitter is constructed using a single piece perfluoroalkoxy (PFA) sensing chamber that does not use any seals. Because the only fluid-wetted surface is PFA, the possibility of fluid contamination is eliminated.


  • No-seal design eliminates fluid contamination sources
  • All PFA flow path
  • Extremely strong sensor/PFA bond
  • Versions available for ultra-high purity water, chemicals, acids, and bases
  • Single-ended and flow-through versions available
  • Integrated vapor leak indicator
  • Not damaged by sub-atmospheric process conditions
  • Temperature compensated output

Pressure Gauges

The Brooks Instrument Series S122/C122/F122 pressure gauges provide extremely reliable local indication of gas pressure in a durable, corrosion-resistant 316L stainless steel construction. These 2 inch dial gauges offer accuracy of 1% of full scale. The gauges are cleaned for oxygen service and suitable for high purity, high cleanliness, and harsh service applications in gas panels, gas cabinets, valve manifold boxes, process analyzers, and more. Offered in a variety of pressure ranges, process connections and socket orientations, Brooks pressure gauges are used in many industries including semiconductor, LED manufacturing, food, beverage, pharmaceutical, water treatment and other industries where cleanliness, durability, and reliability are paramount.

Brooks Instrument also extends the utility of the pressure gauge line by offering an Indicating Pressure Switch, the IPS122 , and Indicating Pressure Transmitter, the IPT122. The IPS122 provides both local indication of gas pressure and solid state alarm switch that can be used to power remote alarm indicators. The IPT122 provides both local indication of gas pressure and the ability to generate a voltage or current analog signal proportional to gas pressure. Both the IPS and IPT are certified intrinsically safe for use in hazardous areas. 

Pressure Regulators

Brooks® 8601 Pressure Regulators are high precision supply pressure regulators which are direct-acting, non-relieving units that provide bubble-tight shut-off on helium at 100 psi. 

Compact and economical, these units are assembled in a “clean room” environment and are tested under simulated operating conditions. 

Pressure Displays

 Brooks offers a new generation of displays for on-tool gas panel applications and ruggedized displays for off-tool and bulk gas delivery applications. Our high-visibility displays provide local readout of pressure components for optimal point-of-application monitoring. Our multi-channel controllers provide programmable alarms and set points for monitoring pressure and liquid levels, while the instant and accurate readout at the component allows customers to troubleshoot and make necessary corrections immediately. Brooks displays can be used for applications that include bulk gas, gas cabinets, gas distribution, wafer polishing, epitaxial layer, oxidation, CVD, ion implant, diffusion, PVD and dry etch.

Vacuum Capacitance Manometers

Rugged, Stable Capacitance Manometers For Process Vacuum Measurement

Brooks digital capacitance manometers (capacitance diaphragm gauges) incorporate industry-leading features that combine to improve measurement reliability, minimize drift, resist diaphragm contamination, and minimize thermal effects. The result is an exceptionally reliable capacitance manometer family for all vacuum measurement applications.

An important benefit of a Brooks capacitance manometer is its advanced Mark-IV sensor. The sensor chamber contains surface areas that are not used in the pressure measurement; these surfaces provide locations for particles and condensable vapors to accumulate without affecting the sensor, dramatically reducing the need for re-zeroing and greatly extending sensor life. The sensor diaphragm is made from corrosion resistant Inconel®.

golden_gas_trans_1_smallBecause they are fully digital devices, Brooks capacitance manometers operate over a wide dynamic range with extremely good accuracy. 

Level Measurement

With more than six decades of experience in designing industrial level measurement products, Brooks Instrument has helped customers with Level solutions around the world. Brooks Instrument’s level products, which include magnetic level gauges, point level alarms, flow switches and flow indicators have been delivering superior performance in the most harsh, hazardous, and demanding level measurement applications since the 1930s. More than 100,000 units have been installed worldwide in industries as diverse as nuclear power plants, refineries, chemical and petrochemical plants, liquefied gas, water and wastewater plants, desalinization plants, condensate and separator systems, boilers, and more.

Brooks delivers more than just high quality products. We deliver high performing level solutions to the toughest problems in the most challenging applications. Our experienced applications consultants will customize a solution to meet your special needs. Our engineering team can also assist with your project engineering documentation upon request to help implement and integrate our products into your final system. 

Point Level Measurement

Point level switches are designed to detect level variations and activate alarms based on one or multiple level points.   They can be used for normal, corrosive, or hazardous liquids and are certified explosion-proof or intrinsically safe. The ANV point level switches are certified and used in the highly demanding nuclear power plant application. Certified material, NACE, radiography options are available to meet customer specifications. 


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