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GF100 Series Thermal Mass Flow Meters & Flow Controllers
TMF-GF125-200Designed for semiconductor, MOCVD and other gas flow control applications that require a high-purity, all-metal flow path, the Brooks GF100 Series mass flow controllers deliver outstanding performance, reliability and flexibility. The GF100 Series has been marathon-tested to over three times the semiconductor industry standard for reliability, ensuring repeatable low-drift performance over time.

  • Ultra-fast 300-millisecond settling time
  • Optional pressure transient insensitive (PTI), high accuracy and safe delivery system models available
  • MultiFlo™ gas and range configurability
  • Corrosion-resistant Hastelloy® sensor tube and valve orifice (jet)



GF40/80 Series Thermal Mass Flow Meters & Flow Controllers
TMF-GF4080-200Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.

  • Elastomer or metal seal
  • Fast sub 1 second settling time
  • MultiFlo gas and range configurability
  • Corrosion-resistant Hastelloy sensor tube



 

 

 

 

MultiFlo Capable Thermal Mass Flow Controllers & Flow Meters

        Max Pressure Max Temp  
Model Type Full Scale Capacity Accuracy bar psig C F Input/Output

TMF-GF125-200

GF125
Ultra-High Purity
PTI Metal Seal Mass Flow Controller
3 sccm - 55 slpm
N2 equivalent
±1% rate
(35-100% FS)
6 85 50 122 0 - 5 Vdc / RS485 / DeviceNet™
Button-Data-Sheet-25Button-Request-A-Quote-25Button-User-Manual-25Button-Sales-Support-25
 

TMF-GF125-200

GF120
Ultra-High Purity
Metal Seal Mass Flow Controller or Flow Meter
3 sccm - 55 slpm
N2 equivalent
±1% rate
(35-100% FS)
33 485 50 122 0 - 5 Vdc / RS485 / DeviceNet™
Button-Data-Sheet-25Button-Request-A-Quote-25Button-Sales-Support-25Button-User-Manual-25
 

TMF-GF125-200

GF100
High Purity Metal Seal Mass Flow Controller or Flow Meter 3 sccm - 55 slpm
N2 equivalent
±1% rate
(35-100% FS)
33 485 50 122 0 - 5 Vdc / RS485 / DeviceNet™
Button-Data-Sheet-25Button-Request-A-Quote-25Button-Sales-Support-25Button-User-Manual-25
 

TMF-GF125-200

GF125 (HA)
Ultra-High Purity High-Accuracy Metal Seal Mass Flow Controller or Flow Meter 5 sccm - 10 slpm
N2 equivalent
±1% rate
(10-100% FS)
6 85 50 122 0 - 5 Vdc / RS485 / DeviceNet™
Button-Data-Sheet-25Button-Request-A-Quote-25Button-Sales-Support-25Button-User-Manual-25

TMF-GF125-200

GF120 (SDS)
Safe Delivery System
Ultra-High Purity Safe Delivery Metal Seal Mass Flow Controller 4 sccm - 1 slpm ±1% rate
(35-100% FS)
33 485 50 122 0 - 5 Vdc / RS485 / DeviceNet™
Button-Data-Sheet-25Button-Request-A-Quote-25Button-Sales-Support-25Button-User-Manual-25

        Max Pressure Max Temp  
Model Type Full Scale Capacity Accuracy bar psig C F Input/Output

TMF-GF4080-200

GF80
Metal Seal Mass Flow Controller or Flow Meter 3 sccm - 30 slpm ±1% rate
(35-100% FS)
10 150 65 150 0-5 Vdc / 4-20 mA / Profibus / RS485 / DeviceNet™
Button-Request-A-Quote-25Button-Sales-Support-25Button-Data-Sheet-25Button-User-Manual-25
 

TMF-GF4080-200

GF40
Elastomer Seal Mass Flow Controller or Flow Meter 3 sccm - 30 slpm ±1% rate
(35-100% FS)
10 150 65 150 0-5 Vdc / 4-20 mA / Profibus / RS485 / DeviceNet™
Button-Request-A-Quote-25Button-Sales-Support-25Button-Data-Sheet-25Button-User-Manual-25

 

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