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General Purpose Thermal Mass Flow Controllers and Flow Meters

        Max Pressure Max Temp  
Model Type Full Scale Capacity Accuracy bar psig C F Input/Output

TMF-SLA5850

SLA5800 Series
Elastomer Seal Meter/Controller 3 sccm - 2500 slpm 1% Rate or 0.7% Rate
0.2% FS
300 4500 65 150 0-5 Vdc, 4-20 mA, RS-485
DeviceNet™
FOUNDATION fieldbus™
Button-Data-Sheet-25Button-User-Manual-25
 

TMF-5850S-200

5800S Series
Mass Flow Meter/Controller 3 sccm - 2500 slpm 0.7% Rate & 0.2% FS 300 4500 65 150 0-5 Vdc, 4-20 mA, RS-232/485
Profibus
FOUNDATION fieldbus™
Button-Data-Sheet-25Button-User-Manual-25
 

TMF-4800

4800 Series
Mass Flow Meter/Controller 50 sccm - 40 slpm ±1% FS or
±3% FS
10 150 50 122 0-5 Vdc, 4-20 mA, RS-232/485
Profibus
Optional Local Operator Interface available for the 4800 Series.
Button-Data-Sheet-25Button-User-Manual-25
Click here to download the 4800 Series Software.

        Max Pressure Max Temp  
Model Type Full Scale Capacity Accuracy bar psig C F Input/Output

TMF-5851EM-200

5850EM
Metal Seal Controller 3 sccm - 30 slpm 1% Rate 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 

TMF-5851EM-200

5851EM
Metal Seal Controller 10 - 100 1% Rate 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5850E-200
5850E
Elastomer Seal
Meter/Controller
3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5851EM-200
5851E
Elastomer Seal
Meter/Controller
10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5853i-200
5853E
Elastomer Seal
Meter/Controller
100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5860E-D-200
5860E
Elastomer Seal Meter 3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5860E-D-200
5861E
Elastomer Seal Meter 10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5863E-200
5863E
Elastomer Seal Meter 100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5850i-200
5850i
Elastomer Seal
Meter/Controller
3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5850i-200
5851i
Elastomer Seal
Meter/Controller
10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5853i-200
5853i
Elastomer Seal
Meter/Controller
100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5860i-Dtype-200
5860i
Elastomer Seal Meter 3 sccm - 30 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5860i-Dtype-200
5861i
Elastomer Seal Meter 10 - 100 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25
 
TMF-5863E-200
5863i
Elastomer Seal Meter 100 - 1000 slpm 1% FS 100 1500 65 150 0-5 Vdc,
4-20 mA
Button-Data-Sheet-25Button-User-Manual-25
 

 

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